Surface figure control for optical filters in fluorescence microscopy

Yi Cao; Lin Tang; Shuaifeng Zhao; Yongxi Zhang; Jing Ma; Xiaojun Yin; Shuguo Fei

doi:10.1117/12.888215

18 February 2011 Surface figure control for optical filters in fluorescence microscopy

Yi Cao, Lin Tang, Shuaifeng Zhao, Yongxi Zhang, Jing Ma, Xiaojun Yin, Shuguo Fei

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79951Z (2011) https://doi.org/10.1117/12.888215
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

The request of fluorescence microscopy filters was introduced. Optimized filter construction which requires more than 100 layers stack on both sides was redesigned. Surface deformation of filters caused by stress of multi-layers film was studied. The stress deformation effected by different film material and thickness was analyzed. A new flatten surface method was used to improve the surface flatness to 0.25λ. Filter sets were manufactured and photomicrograph was obtained with high contrast and no deformations when these filter sets were applied in fluorescence microscopy.

Citation Download Citation

Yi Cao, Lin Tang, Shuaifeng Zhao, Yongxi Zhang, Jing Ma, Xiaojun Yin, and Shuguo Fei "Surface figure control for optical filters in fluorescence microscopy", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79951Z (18 February 2011); https://doi.org/10.1117/12.888215

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