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Proceedings Article

Innovations in structured thin film design and fabrication for optical applications

[+] Author Affiliations
Hongji Qi, Yunxia Jin, Jianda Shao, Zhengxiu Fan

Shanghai Institute of Optics and Fine Mechanics (China)

Jianpeng Wang

Shanghai Institute of Optics and Fine Mechanics (China) and Graduate School of Chinese Academy of Sciences (China)

Andreas Erdmann

Fraunhofer IISB (Germany)

Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799519 (February 17, 2011); doi:10.1117/12.888231
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From Conference Volume 7995

  • Seventh International Conference on Thin Film Physics and Applications
  • Junhao Chu; Zhanshan Wang
  • Shanghai, China | September 24, 2010

abstract

This paper presents the design and fabrication of several versions of structured thin films (STF). One kind of STF is a sculptured thin film, generally deposited with a glancing angle deposition technique. Several optical components were designed and fabricated using this technique. This includes a TiO2 based wave-plate for an operating wavelength of 550 nm, a multilayer based beam splitter with a transmittance of 75.0% for TM light and 38.6% for TE light at 632 nm, and a multilayer based polarization neutral transmission filter for an incidence angle of 45°. Multilayer dielectric gratings (MDG) present another type of STF. To obtain a broad diffraction bandwidth, a novel MDG structure with three materials is proposed. Using multi-parameter optimization, a broadband spectrum with an efficiency >97.5% and a bandwidth >100 nm centered at 800 nm was obtained. For the first time, a new type of two-dimensional (2D) MDG is proposed to obtain higher efficiency (>98%) and broader bandwidth (>110 nm). Finally, the designs of pulse compression gratings and of broadband polarizers, which can be fabricated with a single material, are presented.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Hongji Qi ; Jianpeng Wang ; Andreas Erdmann ; Yunxia Jin ; Jianda Shao, et al.
"Innovations in structured thin film design and fabrication for optical applications", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799519 (February 17, 2011); doi:10.1117/12.888231; http://dx.doi.org/10.1117/12.888231


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