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Proceedings Article

Introduction of Zr in Mg/Co nanometric periodic multilayers

[+] Author Affiliations
Karine Le Guen, Min-Hui Hu, Jean-Michel André, Philippe Jonnard

Lab. de Chimie Physique-Matière et Rayonnement, CNRS, Univ. Pierre et Marie Curie (France)

Sika Zhou, Haochuan Li, Jingtao Zhu, Zhanshan Wang

Tongji Univ. (China)

Nicola Mahne, Angelo Giglia, Stefano Nannarone

Istituto Officina dei Materiali, CNR, Lab. TASC (Italy)

Christian Meny

Institut de Physique et Chimie des Matériaux de Strasbourg, CNRS, Univ. de Strasbourg (France)

Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799525 (February 17, 2011); doi:10.1117/12.888193
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From Conference Volume 7995

  • Seventh International Conference on Thin Film Physics and Applications
  • Junhao Chu; Zhanshan Wang
  • Shanghai, China | September 24, 2010

abstract

We study the introduction of Zr as a third material within a nanometric periodic Mg/Co structure designed to work as optical component in the EUV range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is reported to be 50% at 25.1 nm and 45° of grazing incidence. Nuclear Magnetic Resonance (NMR) measurements are performed to study the nearest neighbour local environment around the Co atoms.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Karine Le Guen ; Min-Hui Hu ; Jean-Michel André ; Philippe Jonnard ; Sika Zhou, et al.
"Introduction of Zr in Mg/Co nanometric periodic multilayers", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799525 (February 17, 2011); doi:10.1117/12.888193; http://dx.doi.org/10.1117/12.888193


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