Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Effect of laser irradiation on the structures properties such as SiO2/Si

[+] Author Affiliations
V. P. Veiko, A. M. Skvortsov, Quang Tung Pham, R. A. Khalecki, E. I. Efimov

St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russian Federation)

V. I. Sokolov

Ioffe Physico-Technical Institute (Russian Federation)

Proc. SPIE 7996, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010, 79960S (February 28, 2011); doi:10.1117/12.889523
Text Size: A A A
From Conference Volume 7996

  • Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010
  • Vadim P. Veiko; Tigran A. Vartanyan
  • St. Petersburg, Russian Federation | July 05, 2010

abstract

In this paper the results of research of influence of laser emission on electrophysical and structural parameters of SiO2/Si system are given. Research samples were irradiated with optical fiber YLP-laser (λ=1,06 μm) with 250ns pulse length. Power of emission in impulse was (2-4) - 7,13 Wt/sm2 . As experimental sample thermal oxidated silicon base KEF-4,5 was used, which crystallographic plane was similar to (100). As a result of experiments it is shown that laser irradiation of Si/SiO2 system can form SiO2+silicon nanoclusters system on silicon film. Nano-engineering of SiO2/Si system is accompanied by essential changing of electrophysical properties of initial MOS structures.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

V. P. Veiko ; A. M. Skvortsov ; V. I. Sokolov ; Quang Tung Pham ; R. A. Khalecki, et al.
"Effect of laser irradiation on the structures properties such as SiO2/Si", Proc. SPIE 7996, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010, 79960S (February 28, 2011); doi:10.1117/12.889523; http://dx.doi.org/10.1117/12.889523


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.