Laser spot size of real-time detection and control system for laser polishing

Feng Lie Zhang; Xing Fu; Qian Lin

doi:10.1117/12.882818

26 May 2011 Laser spot size of real-time detection and control system for laser polishing

Feng Lie Zhang, Xing Fu, Qian Lin

Proceedings Volume 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering; 79972C (2011) https://doi.org/10.1117/12.882818
Event: Fourth International Seminar on Modern Cutting and Measuring Engineering, 2010, Beijing, China

Abstract

During laser micro-machining, the constant control of laser energy density is a key technology to improve the processing precision. This paper presents a laser spot size of real-time detection and control system design on the base CCD and FPGA processing technology. Using CCD video signal binarization method and FPGA processing technology, we realized real time detection and control of spot area on the workpiece to achieve a constant purpose. The relative measurement error of spot size is very small as maximum 0.5 percent, the resolution of spot size measurement is less than 10μm2. This system can be directly applied to control of laser spot in laser micro-polishing.

Citation Download Citation

Feng Lie Zhang, Xing Fu, and Qian Lin "Laser spot size of real-time detection and control system for laser polishing", Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 79972C (26 May 2011); https://doi.org/10.1117/12.882818

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