This study seeks to establish microforming technologies for complex-shaped micro-parts which require multi-axial flow of material. For this purpose, it is important to develop new methods to fabricate micro-moulds and to select suitable materials and processing technology for microforming. 4Cr5MoSiV1 has been used to fabricate micro-moulds and Zr65Cu15Ni10Al10 bulk metallic glass has been employed in micro backward extrusion. Our research has demonstrated: (1) The die mounting base which inner trapezoidal holes has been used instead of the conventional mould would reduce the mould weight and simplify the processing technology. (2) The Zr65Cu15Ni10Al10 BMG flow strain rate decreases significantly with punch diameter and punch speed decreasing in the supercooled liquid region, but low strain rate resulting the extended processing time will cause crystallization phenomenon. (3) Excellent extruding results were obtained under the punch speed of 8×10-3 mm/s at 703 K, the maximum punch load of 1200 N, the punch size of 1.0mm and no pressure holding time.© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.