Amorphous InSb and InAs[sub]0.3[/sub]Sb[sub]0.7[/sub] for long wavelength infrared detection

Timothy Zens; Piotr Becla; Anuradha M. Agarwal; Lionel C. Kimerling; Alvin Drehman

doi:10.1117/12.884103

21 May 2011 Amorphous InSb and InAs_0.3Sb_0.7 for long wavelength infrared detection

Timothy Zens, Piotr Becla, Anuradha M. Agarwal, Lionel C. Kimerling, Alvin Drehman

Proceedings Volume 8012, Infrared Technology and Applications XXXVII; 80123Y (2011) https://doi.org/10.1117/12.884103
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

The structural, electronic, and optical properties of amorphous InSb and InAs_0.3Sb_0.7 films deposited on Corning glass, Al₂O₃ CdZnTe, SiO₂-Si, and CaF2 substrates by Radio Frequency (RF) magnetron sputtering have been studied as they relate to Mid and Long Wavelength Infrared (MWIR and LWIR) detection. Depositions at elevated substrate temperature and pressure of <10mTorr Ar show an emergence of crystalline grains with strong X-ray diffraction peaks at the (111) and (220) orientations. Electronically the amorphous InSb and InAs_0.3Sb_0.7 films deposited at 300K show hopping conduction with resistance in InSb ranging from 44 to 1.1E8 Ω-cm at 300K and 84K respectively. Optical analysis using Fourier transform infrared spectroscopy (FTIR) show the absorption of these films has an absorption tail, the equation of which differing activation energies in InSb and InAs0.3Sb0.7. Amorphous InSb and InAs_0.3Sb_0.7 films showed thermal responsivity in excess of 100V/W for 6μm thick films held at 233K. The maxima and minima of the responsivity are shown to correspond to the interference fringes in the film. The response is highly substrate dependent and compares favorably to other thermal detectors.

Citation Download Citation

Timothy Zens, Piotr Becla, Anuradha M. Agarwal, Lionel C. Kimerling, and Alvin Drehman "Amorphous InSb and InAs_0.3Sb_0.7 for long wavelength infrared detection", Proc. SPIE 8012, Infrared Technology and Applications XXXVII, 80123Y (21 May 2011); https://doi.org/10.1117/12.884103

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