Low-noise UV-to-SWIR broadband photodiodes for large-format focal plane array sensors

Abhay Joshi; Shubhashish Datta

doi:10.1117/12.919254

24 May 2012 Low-noise UV-to-SWIR broadband photodiodes for large-format focal plane array sensors

Abhay Joshi, Shubhashish Datta

Proceedings Volume 8385, Sensors and Systems for Space Applications V; 838507 (2012) https://doi.org/10.1117/12.919254
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

Broadband focal plane array sensors, operating in the 0.25 to 2.5 μm wavelength range, are an enabling technology for several imaging applications including atmospheric greenhouse gas monitoring. Currently, hyper-spectral imagers use separate image sensors for different spectral sub-bands, for example GaN for UV, Si for visible, and InGaAs for IR, thus requiring expensive component-level integration. Our approach is to manufacture a single image sensor with 0.25 to 2.5 μm spectral range using GaAs substrates, which are commercially available in diameters as large as 6 inches. The key challenges, namely achieving high UV efficiency, low dark current, and high speed operation, are addressed separately in a lattice-matched GaAs UV-to-Visible photodiode and a lattice-mismatched InGaAs NIR-to-SWIR photodiode. The method for monolithically combining the two structures into a single UV-to-SWIR photodiode / photodiode array is also presented.

Citation Download Citation

Abhay Joshi and Shubhashish Datta "Low-noise UV-to-SWIR broadband photodiodes for large-format focal plane array sensors", Proc. SPIE 8385, Sensors and Systems for Space Applications V, 838507 (24 May 2012); https://doi.org/10.1117/12.919254

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