Evaluation of 3D metrology potential using a multiple detector CDSEM

Hidemitsu Hakii; Isao Yonekura; Yasushi Nishiyama; Keishi Tanaka; Kenji Komoto; Tsutomu Murakawa; Mitsuo Hiroyama; Soichi Shida; Masayuki Kuribara; Toshimichi Iwai; Jun Matsumoto; Takayuki Nakamura

doi:10.1117/12.977362

29 June 2012 Evaluation of 3D metrology potential using a multiple detector CDSEM

Hidemitsu Hakii, Isao Yonekura, Yasushi Nishiyama, Keishi Tanaka, Kenji Komoto, Tsutomu Murakawa, Mitsuo Hiroyama, Soichi Shida, Masayuki Kuribara, Toshimichi Iwai, Jun Matsumoto, Takayuki Nakamura

Author Affiliations +

Proceedings Volume 8441, Photomask and Next-Generation Lithography Mask Technology XIX; 844113 (2012) https://doi.org/10.1117/12.977362
Event: Photomask and NGL Mask Technology XIX, 2012, Yokohama, Japan

Abstract

As feature sizes of semiconductor device structures have continuously decreased, needs for metrology tools with high precision and excellent linearity over actual pattern sizes have been growing. And it has become important to measure not only two-dimensional (2D) but also three-dimensional (3D) shapes of patterns at 22 nm node and beyond. To meet requirements for 3D metrology capabilities, various pattern metrology tools have been developed. Among those, we assume that CDSEM metrology is the most qualified candidate in the light of its non-destructive, high throughput measurement capabilities that are expected to be extended to the much-awaited 3D metrology technology. On the basis of this supposition, we have developed the 3D metrology system, in which side wall angles and heights of photomask patterns can be measured with high accuracy through analyzing CDSEM images generated by multi-channel detectors. In this paper, we will discuss our attempts to measure 3D shapes of defect patterns on a photomask by using Advantest's "Multi Vision Metrology SEM" E3630 (MVM-SEM™ E3630).

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Hidemitsu Hakii, Isao Yonekura, Yasushi Nishiyama, Keishi Tanaka, Kenji Komoto, Tsutomu Murakawa, Mitsuo Hiroyama, Soichi Shida, Masayuki Kuribara, Toshimichi Iwai, Jun Matsumoto, and Takayuki Nakamura "Evaluation of 3D metrology potential using a multiple detector CDSEM", Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 844113 (29 June 2012); https://doi.org/10.1117/12.977362

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