Characterization of 3D MEMS structural dynamics with a conformal multi-channel fiber optic heterodyne vibrometer

James Kilpatrick; Adela Apostol; Vladimir Markov

doi:10.1117/12.930570

13 September 2012 Characterization of 3D MEMS structural dynamics with a conformal multi-channel fiber optic heterodyne vibrometer

James Kilpatrick, Adela Apostol, Vladimir Markov

Author Affiliations +

Proceedings Volume 8494, Interferometry XVI: Applications; 849402 (2012) https://doi.org/10.1117/12.930570
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Insight into transient structural interactions, including coupled vibrations and modal non-degeneracy (mode splitting) is important to the development of current and next generation vibratory gyroscopes and MEMS resonators. Device optimization based on characterization of these effects is currently time consuming and limited by the requirement to perform spatially distributed measurements with existing single point sensors. In addition, the effects of interest and the diagnosis of their underlying causes and dependences are not readily revealed by traditional modal and finite element analyses. This paper, accordingly, discusses the design of a novel multi-channel fiber-optic heterodyne vibrometer which addresses this requirement directly. We describe a fiber-optic interferometer design which incorporates many standard fiber-optic telecommunications components, configured to support dynamic imaging of the real-time structural behavior of macro and micro vibratory resonators, including planar and 3D micro electromechanical systems (MEMS). The capabilities of the new sensor are illustrated by representative data obtained from a variety of 3D vibratory MEMS structures currently under development.

Citation Download Citation

James Kilpatrick, Adela Apostol, and Vladimir Markov "Characterization of 3D MEMS structural dynamics with a conformal multi-channel fiber optic heterodyne vibrometer", Proc. SPIE 8494, Interferometry XVI: Applications, 849402 (13 September 2012); https://doi.org/10.1117/12.930570

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