Regularized self-tuning phase demodulation for phase-shifting interferometry with arbitrary phase shifts

Orlando Medina; Julio C. Estrada; Manuel Servin

doi:10.1117/12.929756

13 September 2012 Regularized self-tuning phase demodulation for phase-shifting interferometry with arbitrary phase shifts

Orlando Medina, Julio C. Estrada, Manuel Servin

Author Affiliations +

Proceedings Volume 8493, Interferometry XVI: Techniques and Analysis; 84930K (2012) https://doi.org/10.1117/12.929756
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

In this work, we develop a regularization technique to demodulate a phase-shifting interferogram sequence with arbitrary inter-frame phase shifts. With this method, we can recover the modulating phase and inter-frame phase shifts in the same process. As all phase-shifting algorithms, the assumption is that the wavefront under test does not change over time, but the introduction of phase-shifts can vary in a nonconstant way. A notable characteristic of this demodulation method is that not only can it recover the modulating phase, but it is also capable of filtering-out large amounts of corrupting noise. We will show numerical experimental results and comparisons with another already published method to see the performance of the demodulation technique developed herein.

Citation Download Citation

Orlando Medina, Julio C. Estrada, and Manuel Servin "Regularized self-tuning phase demodulation for phase-shifting interferometry with arbitrary phase shifts", Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84930K (13 September 2012); https://doi.org/10.1117/12.929756

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