Paper
10 October 2012 Sculptured thin films as 3D photonic crystals
Vijayakumar C. Venugopal
Author Affiliations +
Abstract
Sculptured thin films (STFs) are columnar thin films nano-engineered to have controllable porosity, structural chirality and periodicity in one, two or three dimensions. These characteristics of STFs have been exploited in developing optical elements such as thin film filters, polarizers, sensors, and waveguides for integrated optics. They can be fabricated by a simple two-stage (lithography and deposition) process. In this paper, we develop a grating theory-based modeling approach for STFs as fully 3D periodic structures. Input for this model consists of a structural parameter set that is easily accessible experimentally. This helps establish a common parameter set for evaluating STFs from a fabrication as well as modeling perspective, thus laying the base required for developing appropriate process monitoring and control methods necessary for successful commercial production. Using the proposed model, we develop a quantitative understanding of the limits of applicability of traditional modeling methods for STFs and develop guidelines for robust design of STF-based devices. We apply this knowledge gained to explore STFs in two illustrative examples: (i) as a notch filter, and (ii) as a 3D photonic crystal. The results demonstrate the potential for success and highlight the remaining challenges that need to be overcome.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vijayakumar C. Venugopal "Sculptured thin films as 3D photonic crystals", Proc. SPIE 8465, Nanostructured Thin Films V, 84650V (10 October 2012); https://doi.org/10.1117/12.929335
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Cited by 1 scholarly publication.
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KEYWORDS
3D modeling

Diffraction

Dysprosium

Process control

Deposition processes

Transmittance

Polarization

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