Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors

Thomas Wood; Judikaël Le Rouzo; François Flory; Paul Coudray; Valmor Roberto Mastelaro; Pedro Pelissari; Sérgio Zilio

doi:10.1117/12.928693

25 October 2012 Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors

Thomas Wood, Judikaël Le Rouzo, François Flory, Paul Coudray, Valmor Roberto Mastelaro, Pedro Pelissari, Sérgio Zilio

Author Affiliations +

Proceedings Volume 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI; 84660T (2012) https://doi.org/10.1117/12.928693
Event: SPIE NanoScience + Engineering, 2012, San Diego, California, United States

Abstract

Two optical techniques, “m-lines” and spectroscopic ellipsometry, are compared for their suitability for obtaining the wavelength and temperature dispersion of the refractive index of thin film layers used in gas detector devices. Two types of materials often integrated into gas sensors are studied: a polymer organic-inorganic blend deposited by spin-coating typically used in near infra-red waveguides and the ceramic semiconductor SrTi₁-_xFe_xO₃ (strontium titanate) doped with iron at concentrations x = 0.075 and 0.1 deposited by electron beam deposition. In this paper, we will compare the refractive index dispersion obtained by m-lines and ellipsometry, and comment on the differences between the measured parameters for the two materials. The chromatic dispersion will be represented by a three term Cauchy law. An intuitive method of verifying the measured indices using an integrating sphere and reflexion coefficient modelling techniques will also be demonstrated. Thermo-optic coefficients of the order of -1×10^-4/K for both materials are reported, and very low chromatic dispersions are also measured thanks to the high sensitivity of the m-lines technique.

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Thomas Wood, Judikaël Le Rouzo, François Flory, Paul Coudray, Valmor Roberto Mastelaro, Pedro Pelissari, and Sérgio Zilio "Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors", Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 84660T (25 October 2012); https://doi.org/10.1117/12.928693

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