Polishing large-aperture mirror using ultraprecise Bonnet and PSD result analysis

Wei Wang; Min Xu; Hongyu Li; Guoyu Yu

doi:10.1117/12.977788

16 October 2012 Polishing large-aperture mirror using ultraprecise Bonnet and PSD result analysis

Wei Wang, Min Xu, Hongyu Li, Guoyu Yu

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84160P (2012) https://doi.org/10.1117/12.977788
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

As the development of modern optical technology, especially space optical science, more high precision mirrors with large apertures are needed. But it is difficult to manufacture high precision large aperture optical components. The method of optical polishing using an ultra-precise bonnet is based upon the technology of computer controlled optical surfacing. A bonnet filled with air is applied as a precise polishing tool which is flexible and able to adapt itself well to the shape of the part, which is superior to other polishing methods. A material removing model of bonnet precessed polishing is established according to kinematic principle based on the Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. A satisfactory result was obtained for one of the surfaces of a wedge mirror with a diameter of 570mm. The resulted PV and RMS parameters are 1/8 λ and 1/75 λ respectively.

Citation Download Citation

Wei Wang, Min Xu, Hongyu Li, and Guoyu Yu "Polishing large-aperture mirror using ultraprecise Bonnet and PSD result analysis", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84160P (16 October 2012); https://doi.org/10.1117/12.977788

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