Analysis and optimization of tooth shapes of roll stampers for optical micro-structured array imprinting

Su Yang; Xiangchao Zhang; Min Xu

doi:10.1117/12.978244

16 October 2012 Analysis and optimization of tooth shapes of roll stampers for optical micro-structured array imprinting

Su Yang, Xiangchao Zhang, Min Xu

Author Affiliations +

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84161J (2012) https://doi.org/10.1117/12.978244
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

With the development of manufacturing technologies of large-scale polymeric micro-patterns, the Roll-to-Roll fabrication has received more and more attention. Its advantages of large area, high efficiency and low cost make this process very competitive. Requirements on high accuracy for functional optical micro-structures impose new challenges for processing precision of the roll stamper. Taking into account the difference between traditional imprinting and Roll imprinting, we build a mathematical model to optimize the tooth shapes of the rolls for compensating the structure distortion during the rolling motion. Squared patterns are adopted to demonstrate the validity of this compensation method. Through simulation and testing, the results indicate that after optimization of structure, the manufacturing accuracy of the polymer structure can be improved by 78.7%.

Citation Download Citation

Su Yang, Xiangchao Zhang, and Min Xu "Analysis and optimization of tooth shapes of roll stampers for optical micro-structured array imprinting", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161J (16 October 2012); https://doi.org/10.1117/12.978244

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