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Proceedings Article

Sophisticated light scattering techniques from the VUV to the IR regions

[+] Author Affiliations
Sven Schröder, Marcus Trost, Tobias Herffurth, Alexander von Finck, Angela Duparré

Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)

Proc. SPIE 8495, Reflection, Scattering, and Diffraction from Surfaces III, 84950V (October 15, 2012); doi:10.1117/12.929923
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From Conference Volume 8495

  • Reflection, Scattering, and Diffraction from Surfaces III
  • Leonard M. Hanssen
  • San Diego, California, USA | August 12, 2012

abstract

Light scattering based characterization techniques are well suited to meet the challenging requirements for fast and sensitive finish assessment of optical surfaces. Further advantages are the high flexibility and robustness which enable the inspection of large geometries and freeform optics that are sometimes too complex for characterization techniques like atomic force microscopy or white light interferometry. In this paper, we report on the development of instruments for total and angle resolved light scattering measurements at wavelengths ranging from the vacuum ultraviolet to the infrared spectral regions. Extremely high sensitivities equivalent to surface roughness levels of below 0.1 nm and dynamic ranges of up to 15 orders of magnitude have been achieved. In addition to laboratory-based equipment, compact and table-top tools are discussed which enable the advantages of light scattering metrology to be used for characterization tasks close to or even in manufacturing processes. Instructive examples of applications are presented ranging from the characterization of diamond-turned and polished substrates to interference coatings, diffraction gratings, and IR window materials. © (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Sven Schröder ; Marcus Trost ; Tobias Herffurth ; Alexander von Finck and Angela Duparré
" Sophisticated light scattering techniques from the VUV to the IR regions ", Proc. SPIE 8495, Reflection, Scattering, and Diffraction from Surfaces III, 84950V (October 15, 2012); doi:10.1117/12.929923; http://dx.doi.org/10.1117/12.929923


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