Light scattering based characterization techniques are well suited to meet the challenging requirements for fast and
sensitive finish assessment of optical surfaces. Further advantages are the high flexibility and robustness which enable
the inspection of large geometries and freeform optics that are sometimes too complex for characterization techniques
like atomic force microscopy or white light interferometry.
In this paper, we report on the development of instruments for total and angle resolved light scattering measurements at
wavelengths ranging from the vacuum ultraviolet to the infrared spectral regions. Extremely high sensitivities equivalent
to surface roughness levels of below 0.1 nm and dynamic ranges of up to 15 orders of magnitude have been achieved. In
addition to laboratory-based equipment, compact and table-top tools are discussed which enable the advantages of light
scattering metrology to be used for characterization tasks close to or even in manufacturing processes. Instructive
examples of applications are presented ranging from the characterization of diamond-turned and polished substrates to
interference coatings, diffraction gratings, and IR window materials.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sven Schröder ; Marcus Trost ; Tobias Herffurth ; Alexander von Finck and Angela Duparré
Sophisticated light scattering techniques from the VUV to the IR regions
", Proc. SPIE 8495, Reflection, Scattering, and Diffraction from Surfaces III, 84950V (October 15, 2012); doi:10.1117/12.929923; http://dx.doi.org/10.1117/12.929923