Microchannel Detection of Microfluidic Chips with Digital Holography Imaging System

Yunxin Wang; Dayong Wang; Dengcai Yang; Liting Ouyang; Jie Zhao; Panezai Spozmai

doi:10.1117/12.978641

15 October 2012 Microchannel detection of microfluidic chips with digital holography imaging system

Yunxin Wang, Dayong Wang, Dengcai Yang, Liting Ouyang, Jie Zhao, Panezai Spozmai

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 841816 (2012) https://doi.org/10.1117/12.978641
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

The quality of the microfluidic chip will influence the separations, injections, reactions and measurements of samples in the microfluidic system, it is essential to detect the structure such as the width, depth and roughness for evaluating its performance. Aiming at this requirement, digital holography microscope method is developed to achieve the quantitative, non-contact phase imaging with the full field. Firstly, the digital image plane holographic microscopy is designed, and the complex amplitude of the whole wave field is reconstructed by the angular spectrum method. The two-step phase subtraction and surface fitting methods are combined to eliminate the phase aberration, and the unwrapped phase information is extracted using the least-squares phase-unwrapping algorithm. Meanwhile, we acquire the profile parameters of the microchannel using white light interferometer, and the results demonstrate that the digital image plane holographic microscopy is feasible and effective for the profile measurement of microchannels in the microfluidic chip.

Citation Download Citation

Yunxin Wang, Dayong Wang, Dengcai Yang, Liting Ouyang, Jie Zhao, and Panezai Spozmai "Microchannel detection of microfluidic chips with digital holography imaging system", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 841816 (15 October 2012); https://doi.org/10.1117/12.978641

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