Structural And Gas Sensing Properties of Sprayed Antimony Doped Tin-Oxide Thin Films.

P. S. Joshi; D. S. Sutrave; S. M. Jogade; B. N. Jamadar

doi:10.1117/12.926870

15 October 2012 Structural and gas sensing properties of sprayed antimony doped tin oxide thin films

P. S. Joshi, D. S. Sutrave, S. M. Jogade, B. N. Jamadar

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85490Y (2012) https://doi.org/10.1117/12.926870
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

Metal oxides currently constitute the most investigated groups of gas sensors. Among various metal oxides, tin-oxide has emerged as one of the potential candidate due to high conductivity coupled with high sensitivity to both oxidizing and reducing gases. In this context, attempts are made to deposit thin film of tin-oxide doped with antimony by spray pyrolysis technique on glass substrate which were heated at 375°C. The concentration of antimony was increased from 0.01% to 1%. The films obtained were blackish in color. The XRD pattern shows characteristic tin-oxide peaks with tetragonal structure. The NO₂ gas sensing properties were investigated at 250°C, it showed maximum sensitivity for the SnO₂:Sb films with 1% Sb concentration.

Citation Download Citation

P. S. Joshi, D. S. Sutrave, S. M. Jogade, and B. N. Jamadar "Structural and gas sensing properties of sprayed antimony doped tin oxide thin films", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85490Y (15 October 2012); https://doi.org/10.1117/12.926870

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