MEMS Deformable Mirrors: Technology and Applications

Amita Gupta; R. Singh; Monika Chaudhary; Shailesh Kumar; A. K. Meena

doi:10.1117/12.925268

15 October 2012 MEMS deformable mirrors: technology and applications

Amita Gupta, R. Singh, Monika Chaudhary, Shailesh Kumar, A. K. Meena

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85491B (2012) https://doi.org/10.1117/12.925268
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

The micromachined deformable or adaptive mirrors are being used in modern optical systems for astronomical imaging, laser-based communications and biomedical imaging. Deformable mirror fabricated using MEMS technology is a low cost, compact adaptive optical element for correction of the lower order optical aberrations such as defocus & astigmatism. In this paper, important development aspects of micromachined membrane mirror are discussed. The device has been successfully fabricated and characterized for various applications.

Citation Download Citation

Amita Gupta, R. Singh, Monika Chaudhary, Shailesh Kumar, and A. K. Meena "MEMS deformable mirrors: technology and applications", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85491B (15 October 2012); https://doi.org/10.1117/12.925268

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