Nanostructured TiO2 Thin Films for Field Emission and Sensor Applications

N. C. Raut

doi:10.1117/12.927428

15 October 2012 Nanostructured TiO₂ thin films for field emission and sensor applications

N. C. Raut

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85492I (2012) https://doi.org/10.1117/12.927428
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

Thin films consisting TiO₂ nanoparticles were synthesized by a cost effective ultrasonic spray pyrolysis technique on Si(100) and glass substrates at temperatures of 350 and 450 °C. The films were found to be anatase phase of TiO₂ from GIXRD and Raman studies. Effect of substrate temperature on growth process was monitored using FESEM technique. The substrate temperature influenced the morphology of the films and also on the field emission properties. The asdeposited semi-conducting TiO₂ films were investigated for the utilization of alcohol sensor at room temperature.

Citation Download Citation

N. C. Raut "Nanostructured TiO₂ thin films for field emission and sensor applications", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85492I (15 October 2012); https://doi.org/10.1117/12.927428

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