Nanomorphology of ZnSe on patterned substrate

N. B. Singh; G. Kanner; K. Green; M. Marable; A. Berghmans; B. Wagner; D. Kahler; D. J. Knuteson; M. King; S. McLaughlin

doi:10.1117/12.945987

15 October 2012 Nanomorphology of ZnSe on patterned substrate

N. B. Singh, G. Kanner, K. Green, M. Marable, A. Berghmans, B. Wagner, D. Kahler, D. J. Knuteson, M. King, S. McLaughlin

Author Affiliations +

Proceedings Volume 8497, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VI; 849702 (2012) https://doi.org/10.1117/12.945987
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

We have grown high quality oriented nano particles of zinc selenide (ZnSe) on patterned gallium arsenide (GaAs) substrates. We have developed and used silver and gold based templates with domains of 35 μm. We observed that the films grew epitaxially on the non-patterned portion of GaAs wafers with 4° miscut from (001). Several samples of thickness ranging from 5 μm to 1 mm thickness of ZnSe were grown in a vertical closed tube using the temperature gradient as the driving force. The quality of the samples was analyzed by X-ray and morphology was studied by SEM, FIB, and AFM and by etching the films. The rocking curve showed that the FWHM values for different films were in the range of 300-350 arcs second. We observed that film on (001) portion of the template grew with smooth morphology but morphology was slightly different on the templates. The grown film had strong (111) peak also on the patterned substrate in addition to the (001) peak observed for the film on unpatterned substrate.

Citation Download Citation

N. B. Singh, G. Kanner, K. Green, M. Marable, A. Berghmans, B. Wagner, D. Kahler, D. J. Knuteson, M. King, and S. McLaughlin "Nanomorphology of ZnSe on patterned substrate", Proc. SPIE 8497, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VI, 849702 (15 October 2012); https://doi.org/10.1117/12.945987

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Gallium arsenide

Semiconducting wafers

Particles

Gold

Silver

Etching

Scanning electron microscopy

Show All Keywords

Keywords/Phrases

Search In:

Publication Years