Comparison and analysis of three different methods for the paraboloid testing

Er-long Miao

doi:10.1117/12.977929

15 October 2012 Comparison and analysis of three different methods for the paraboloid testing

Er-long Miao

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841704 (2012) https://doi.org/10.1117/12.977929
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Paraboloid is a special asphere and is widely used in optical system. This paper is focused on the Paraboloid testing error analysis and synthesis in practical. A paraboloid from ZYGO is tested using three different methods which are computer generated hologram (CGH), small ball and multi-zone stitching metrology method. The three methods are realized in a fine controlled lab utilizing ZYGO FIZEAU interferometer and the test results are compared and analyzed. Error synthesis is also performed and the uncertainty of the tests is less than 4.5nm.

Citation Download Citation

Er-long Miao "Comparison and analysis of three different methods for the paraboloid testing", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841704 (15 October 2012); https://doi.org/10.1117/12.977929

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available