Development of the flatness standard equipment

Mengxia Liu

doi:10.1117/12.971458

15 October 2012 Development of the flatness standard equipment

Mengxia Liu

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841712 (2012) https://doi.org/10.1117/12.971458
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Flatness is an important parameter of independent transmission in geometric metrology. The flatness standard is by interferometer and optical flats to implement transmission. Main parts of the flatness standard equipment are composed of a laser point diffraction interference system, one phase shifts system and one image acquisition system. The equipment is three PZTs to drive the Φ 300mm reference optical flat to move, only one CCD to adjust attitudes of the optical flats by reflecting spots and capture a series of interference pictures. The whole equipment is placed on a one 1200mm×800mm optical platform, and the optical platform is placed on a Φ1800mm vibration-free base. The optical system of the flatness standard equipment is very simple, which only needs a frequency stabilized He-Ne laser and a space filter to construct a point source, one reflecting mirror, one beam splitter, one Φ 300mm transparent collimating system, one needle-hole stop, one CCD and its lens.

Citation Download Citation

Mengxia Liu "Development of the flatness standard equipment", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841712 (15 October 2012); https://doi.org/10.1117/12.971458

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