Measurement of power spectral density of optical super-smooth surface

Dai Lei

doi:10.1117/12.970308

15 October 2012 Measurement of power spectral density of optical super-smooth surface

Dai Lei

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84171B (2012) https://doi.org/10.1117/12.970308
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

This Paper discusses techniques for measurements power spectral density (PSD) of optical super-smooth surface using scanning white light interferometer (SWLI). Analyzing the key point of PSD measurement, how to reduce the noise level and the system error. Using different objectives to test surface and giving PSD distribution spatial frequency range from 1 to 1000 mm^-1. Then it will be convenient to the roughness of certain spatial frequency range. Roughness of super smooth surface is nearly 0.5nm rms from 1 to 1000 mm^-1.

Citation Download Citation

Dai Lei "Measurement of power spectral density of optical super-smooth surface", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84171B (15 October 2012); https://doi.org/10.1117/12.970308

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