We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.
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Donald A. Walko ; Il Woong Jung ; Daniel Lopez ; Deepkishore Mukhopadhyay ; Craig P. Schwartz, et al.
Temporal modulation of synchrotron x-rays using torsional MEMS mirrors
", Proc. SPIE 8502, Advances in X-Ray/EUV Optics and Components VII, 85020H (October 15, 2012); doi:10.1117/12.930057; http://dx.doi.org/10.1117/12.930057