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Proceedings Article

Optical characterization of high mobility polycrystalline ZnO:Al films

[+] Author Affiliations
Florian Ruske, Mark Wimmer, Grit Köppel, Bernd Rech

Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)

Andreas Pflug

Fraunhofer-Institut für Schicht- und Oberflächentechnik (Germany)

Proc. SPIE 8263, Oxide-based Materials and Devices III, 826303 (February 9, 2012); doi:10.1117/12.908969
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From Conference Volume 8263

  • Oxide-based Materials and Devices III
  • Ferechteh H. Teherani; David C. Look; David J. Rogers
  • San Francisco, California, USA | January 21, 2012

abstract

Optical methods are powerful and non-destructive means to characterize highly doped transparent conducting oxide thin films. In order to describe the optical properties of high-mobility ZnO films we present a dielectric function composed of different analytic expressions to describe the different contributions to the dielectric function of the films. This allows for the correct description of measured optical spectra and reduces the complex functions to a set of fitting parameters. In a second step we compare the obtained parameters to theoretical models. The basic theories are nicely reproduced and the basic link between optical and electrical properties can be understood. The findings can help on the route to a complete presiction of optical properties from the basic material properties or vice versa.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Florian Ruske ; Mark Wimmer ; Grit Köppel ; Andreas Pflug and Bernd Rech
"Optical characterization of high mobility polycrystalline ZnO:Al films", Proc. SPIE 8263, Oxide-based Materials and Devices III, 826303 (February 9, 2012); doi:10.1117/12.908969; http://dx.doi.org/10.1117/12.908969


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