Paper
26 November 2012 Based on the method of subaperture splicing detection on spherical
Weirui Zhao, Zhengnan Liang, Guangyu Pan
Author Affiliations +
Abstract
This thesis studies the stitching interferometry of large aperture optical aspheric surface. Analyzing the data of the adjacent two sub apertures overlap by using SIFT algorithm, we obtained the stitching parameters between the sub-aperture and the overall surface information of the inspected mirror. We wrote the interference graph solution phase program, Zernike fitting program, stitching test program, and completed the principle experiment. We have given the compare results of stitching and full caliber testing, the RMS deviation of the two kinds of method is less than 2nm.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weirui Zhao, Zhengnan Liang, and Guangyu Pan "Based on the method of subaperture splicing detection on spherical", Proc. SPIE 8557, Optical Design and Testing V, 85571S (26 November 2012); https://doi.org/10.1117/12.999814
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Mirrors

Optical components

Spherical lenses

Wavefronts

Interferometers

Optical testing

Aspheric lenses

Back to Top