Beam splitters of metal-dielectric reflective gratings

Anduo Hu; Changhe Zhou; Hongchao Cao; Jun Wu; Jia Wei

doi:10.1117/12.999299

26 November 2012 Beam splitters of metal-dielectric reflective gratings

Anduo Hu, Changhe Zhou, Hongchao Cao, Jun Wu, Jia Wei

Proceedings Volume 8556, Holography, Diffractive Optics, and Applications V; 85560Y (2012) https://doi.org/10.1117/12.999299
Event: Photonics Asia, 2012, Beijing, China

Abstract

Beam splitters are important optical components. In this paper, reflective 1×2 and 1×3 beam splitters based on metaldielectric gratings are designed at wavelength of 1064 nm for TE polarization. Alumina, silver, alumina and fused silica films are coated on substrate in sequence. On the top fused silica film, grating with rectangular grooves are etched. Rigorous coupled-wave analysis (RCWA) and simulated annealing (SA) algorithm are employed to optimize grating parameters such as period, depth, thickness of connecting layer and incident angle. An optimized 1×2 beam splitter can achieve perpendicular beam splitting with diffraction efficiency of 49.2% at the -1^st order and 49.1% at the 0^th order for incident angle of 30°. When incident angle is 5°, the diffraction efficiencies of the optimized 1×3 beam splitter are 32.66% at the -1st order, 32.71% at the 0^th order and 32.72% at the 1^st order. To guide the fabrication and operation of beam splitters, the tolerance of grating period, depth, thickness of connecting layer are calculated. The optimized 1×2 and 1×3 beam splitters exhibit high efficiencies and uniformity, which should be useful in applications.

Citation Download Citation

Anduo Hu, Changhe Zhou, Hongchao Cao, Jun Wu, and Jia Wei "Beam splitters of metal-dielectric reflective gratings", Proc. SPIE 8556, Holography, Diffractive Optics, and Applications V, 85560Y (26 November 2012); https://doi.org/10.1117/12.999299

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