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Proceedings Article

High-speed surface slope measuring profiler for aspheric shapes

[+] Author Affiliations
Hiroki Matsumura, Koji Usuki, Takao Kitayama, Hiroki Matsumura, Takuya Kojima, Junichi Uchikoshi, Katsuyoshi Endo

Osaka Univ. (Japan)

Yasuo Higashi

High Energy Accelerator Research Organization, Japan (Japan)

Tatsuya Kume, Kazuhiro Enami

High Energy Accelerator Research Organization (Japan)

Proc. SPIE 8550, Optical Systems Design 2012, 85501W (December 18, 2012); doi:10.1117/12.981154
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From Conference Volume 8550

  • Optical Systems Design 2012
  • Laurent Mazuray; Rolf Wartmann; Andrew P. Wood; Marta C. de la Fuente; Jean-Luc M. Tissot; Jeffrey M. Raynor; Tina E. Kidger; Stuart David; Pablo Benítez; Daniel G. Smith; Frank Wyrowski; Andreas Erdmann
  • Barcelona, Spain | November 26, 2012

abstract

A new high-speed slope measuring instrument is currently under development for small-aperture aspheric lenses and mirrors. In the present study, normal vectors at each point on the lens surface were determined using the reflected light beam that follows the same path as the incident beam. The capability of the developed instrument to achieve submicroradian surface slope metrology of a small-radius aspheric lens was verified. The paper also describes in detail the design principle, aspheric lens measuring method, initial alignment and calibration procedure, shape determination procedure developed from the measured slope metrology, and the high-speed slope measuring technique.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Hiroki Matsumura ; Koji Usuki ; Takao Kitayama ; Hiroki Matsumura ; Takuya Kojima, et al.
"High-speed surface slope measuring profiler for aspheric shapes", Proc. SPIE 8550, Optical Systems Design 2012, 85501W (December 18, 2012); doi:10.1117/12.981154; http://dx.doi.org/10.1117/12.981154


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