High-speed surface slope measuring profiler for aspheric shapes

Hiroki Matsumura; Koji Usuki; Takao Kitayama; Takuya Kojima; Junichi Uchikoshi; Yasuo Higashi; Tatsuya Kume; Kazuhiro Enami; Katsuyoshi Endo

doi:10.1117/12.981154

18 December 2012 High-speed surface slope measuring profiler for aspheric shapes

Hiroki Matsumura, Koji Usuki, Takao Kitayama, Takuya Kojima, Junichi Uchikoshi, Yasuo Higashi, Tatsuya Kume, Kazuhiro Enami, Katsuyoshi Endo

Author Affiliations +

Proceedings Volume 8550, Optical Systems Design 2012; 85501W (2012) https://doi.org/10.1117/12.981154
Event: SPIE Optical Systems Design, 2012, Barcelona, Spain

Abstract

A new high-speed slope measuring instrument is currently under development for small-aperture aspheric lenses and mirrors. In the present study, normal vectors at each point on the lens surface were determined using the reflected light beam that follows the same path as the incident beam. The capability of the developed instrument to achieve submicroradian surface slope metrology of a small-radius aspheric lens was verified. The paper also describes in detail the design principle, aspheric lens measuring method, initial alignment and calibration procedure, shape determination procedure developed from the measured slope metrology, and the high-speed slope measuring technique.

Citation Download Citation

Hiroki Matsumura, Koji Usuki, Takao Kitayama, Takuya Kojima, Junichi Uchikoshi, Yasuo Higashi, Tatsuya Kume, Kazuhiro Enami, and Katsuyoshi Endo "High-speed surface slope measuring profiler for aspheric shapes", Proc. SPIE 8550, Optical Systems Design 2012, 85501W (18 December 2012); https://doi.org/10.1117/12.981154

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