A new high-speed slope measuring instrument is currently under development for small-aperture aspheric lenses and
mirrors. In the present study, normal vectors at each point on the lens surface were determined using the reflected light
beam that follows the same path as the incident beam. The capability of the developed instrument to achieve submicroradian
surface slope metrology of a small-radius aspheric lens was verified. The paper also describes in detail the
design principle, aspheric lens measuring method, initial alignment and calibration procedure, shape determination
procedure developed from the measured slope metrology, and the high-speed slope measuring technique.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation
Hiroki Matsumura ; Koji Usuki ; Takao Kitayama ; Hiroki Matsumura ; Takuya Kojima, et al.
"High-speed surface slope measuring profiler for aspheric shapes", Proc. SPIE 8550, Optical Systems Design 2012, 85501W (December 18, 2012); doi:10.1117/12.981154; http://dx.doi.org/10.1117/12.981154
