Paper
4 March 2013 Narrow-linewidth three-electrode regrowth-free semiconductor DFB lasers with uniform surface grating
Author Affiliations +
Proceedings Volume 8640, Novel In-Plane Semiconductor Lasers XII; 864009 (2013) https://doi.org/10.1117/12.2005368
Event: SPIE OPTO, 2013, San Francisco, California, United States
Abstract
There has been much interest in developing low-cost laser sources for applications such as photonics integrated circuits and advanced coherent optical communications. The ultimate objectives in this development include wide wavelength tunability, a narrow linewidth, and an ease of integration with other devices. For this purpose, semiconductor surface grating distributed feedback (SG-DFB) lasers have been introduced. SG-DFB manufacturing consists of a unique sequence of planar epitaxial growth resulting in a major simplification to the fabrication process. SG-DFB lasers are highly monolithically integrate-able with other devices due to their small footprint. The segmentation of the built-in top electrode helps to alleviate the adverse spatial-hole burning effects encountered in single-electrode devices and brings hence significant enhancements to the laser performance. For the first time, we report here on the design, fabrication, and characterization of InGaAsP/InP multiple-quantum-well (MQW) SG-DFB lasers with uniform third-order surface grating etched by means of stepper lithography and inductively-coupled reactive-ion. The uncoated device reported here is 750 μm-long SG-DFB laser whose central and lateral top electrodes are 244 μmlongs each, separated by two 9 μm-long grooves. The experimental characterization shows stable single mode operation at room temperature under uniform and non-uniform injection. High side mode suppression ratios (SMSRs) (50-55dB) under a wide range of injection current have been discerned as well. A relatively broad wavelength tuning (<4nm) has also been observed. Moreover, a narrow linewidth (<300 kHz) has been recorded for different injection currents.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kais Dridi, Abdessamad Benhsaien, Akram Akrout, Jessica Zhang, and Trevor Hall "Narrow-linewidth three-electrode regrowth-free semiconductor DFB lasers with uniform surface grating", Proc. SPIE 8640, Novel In-Plane Semiconductor Lasers XII, 864009 (4 March 2013); https://doi.org/10.1117/12.2005368
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Cited by 3 scholarly publications.
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KEYWORDS
Electrodes

Semiconductor lasers

Etching

Photonic integrated circuits

Waveguides

Lithography

Semiconductors

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