Two new MEMS deformable mirrors have been designed and fabricated, one having a continuous facesheet with an
active aperture of 20mm and 2040 actuators and the other, a similarly sized segmented tip tilt piston DM containing
1021 elements and 3063 actuators. The surface figures, electro mechanical performances, and actuator yield of these
devices, with statistical information, are reported here. The statistical distributions of these measurements directly
illustrate the surface variance of Boston Micromachines deformable mirrors. Measurements of the surface figure
were also performed with the elements at different actuation states. Also presented here are deviations of the surface
figure under actuation versus at its rest state, the electromechanical distribution, and a dynamic analysis.
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Peter J. Ryan ; Steven A. Cornelissen ; Charlie V. Lam and Paul A. Bierden
Performance analysis of two high actuator count MEMS deformable mirrors
", Proc. SPIE 8617, MEMS Adaptive Optics VII, 861705 (March 5, 2013); doi:10.1117/12.2005299; http://dx.doi.org/10.1117/12.2005299