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Proceedings Article

Micro-hole drilling with femtosecond fiber laser

[+] Author Affiliations
Huan Huang, Lih-Mei Yang, Jian Liu

PolarOnyx, Inc. (United States)

Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070K (March 13, 2013); doi:10.1117/12.2004888
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From Conference Volume 8607

  • Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
  • Xianfan Xu; Guido Hennig; Yoshiki Nakata; Stephan W. Roth
  • San Francisco, California, USA | February 02, 2013

abstract

Femtosecond (fs) laser becomes more popular in precise material procesing due to the limited heat affected zone (HAZ) over longer laser pulses. In this paper, micro-hole drilling in ambient air with fs fiber laser at 1030 nm is presented. Micro holes were fabricated in both transparent (polymer and glass), and non-transparent materials (metal and tissue). A scanning electron microscopy is used to investigate the hole quality. Both percusiion drilling and trepanning drilling methods were evaluated and compared. High quality micro holes with no visible micro-cracks were demonstrated. Micro-hole drilling in hard and soft tissues with no collateral thermal damage is observed. This study can be extended to MEMS, microfluidic, and micro surgery applications. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Huan Huang ; Lih-Mei Yang and Jian Liu
" Micro-hole drilling with femtosecond fiber laser ", Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070K (March 13, 2013); doi:10.1117/12.2004888; http://dx.doi.org/10.1117/12.2004888


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