Low-NA focused vortex beam lithography for below 100-nm feature size at 405 nm illumination

Myun-Sik Kim; Toralf Scharf; Hans Peter Herzig; Reinhard Voelkel

doi:10.1117/12.2002138

5 March 2013 Low-NA focused vortex beam lithography for below 100-nm feature size at 405 nm illumination

Myun-Sik Kim, Toralf Scharf, Hans Peter Herzig, Reinhard Voelkel

Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 86131A (2013) https://doi.org/10.1117/12.2002138
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

We present a novel method for the optical fabrication of particular structures with sub-100-nm features by using direct-write laser lithography at 405-nm wavelength. A doughnut-shaped spot, generated by focusing an azimuthally polarized beam using an NA=0.2 lens, exhibits a central dark region, i.e., optical vortex. This is the key to write well-isolated nano-structures like nano-cylinders. A decomposition of such doughnut spots leads to two-half-lobes spots that can create line patterns when linearly scanned. This method is fast and inexpensive to fabricate well-isolated nano-cylinders or nano-holes and nanometer-size line patterns or trenches compared to other nano-fabrication methods. They can find applications for the fabrication of a nano solid immersion lens, an isolated quantum dot, plasmonic waveguides, and for micro- and nano-fluidics.

Citation Download Citation

Myun-Sik Kim, Toralf Scharf, Hans Peter Herzig, and Reinhard Voelkel "Low-NA focused vortex beam lithography for below 100-nm feature size at 405 nm illumination", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86131A (5 March 2013); https://doi.org/10.1117/12.2002138

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available