Integrated surface plasmon resonance resonator using silicon on insulator

Geum-Yoon Oh; Doo-Gun Kim; Seon Hoon Kim; Hyun Chul Ki; Tae Un Kim; Hong-Seung Kim; Tae-Kyeong Lee; Byeong-Hyeon Lee; Young-Wan Choi

doi:10.1117/12.2004946

13 March 2013 Integrated surface plasmon resonance resonator using silicon on insulator

Geum-Yoon Oh, Doo-Gun Kim, Seon Hoon Kim, Hyun Chul Ki, Tae Un Kim, Hong-Seung Kim, Tae-Kyeong Lee, Byeong-Hyeon Lee, Young-Wan Choi

Author Affiliations +

Proceedings Volume 8627, Integrated Optics: Devices, Materials, and Technologies XVII; 862719 (2013) https://doi.org/10.1117/12.2004946
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

We introduce an ultra-sensitive integrated photonic sensor structure using silicon on insulator based triangular resonator, in which a surface plasmon resonance (SPR) gold film is applied on a total internal reflection mirror. We have analyzed and optimized the triangular resonator sensor structure with an extremely small SPR mirror sensing area. Due to the large phase shift in the SPR mirror, a significantly enhanced sensitivity of 800 nm/RIU (refractive index unit) and the maximum peak shift of half free spectral range have been obtained at the SPR angle of 22.65° with Au thickness of 35 nm for the change of the refractive index Δn = 1x10^-3.

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Geum-Yoon Oh, Doo-Gun Kim, Seon Hoon Kim, Hyun Chul Ki, Tae Un Kim, Hong-Seung Kim, Tae-Kyeong Lee, Byeong-Hyeon Lee, and Young-Wan Choi "Integrated surface plasmon resonance resonator using silicon on insulator", Proc. SPIE 8627, Integrated Optics: Devices, Materials, and Technologies XVII, 862719 (13 March 2013); https://doi.org/10.1117/12.2004946

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