Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode

E. Markweg; M. Hoffmann

doi:10.1117/12.2003625

13 March 2013 Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode

E. Markweg, M. Hoffmann

Proceedings Volume 8616, MOEMS and Miniaturized Systems XII; 86160A (2013) https://doi.org/10.1117/12.2003625
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

We present an integrated beam scanning system without moving mechanical parts. The device based on the thermooptical effect. In combination with a silicon oxynitrid waveguide and a planar integrated lens we use thin film heaters for thermooptical deflection of a guided mode close to the edge of an integrated optical chip. This leads to a deflection at the collimation optic consisting of a planar lens. We show thermal simulation for the optimization of the heater position. The result of the thermal simulation is combined with BPM simulation to evaluate the change of the mode position during heating. First deflection measurements of the system are shown.

Citation Download Citation

E. Markweg and M. Hoffmann "Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160A (13 March 2013); https://doi.org/10.1117/12.2003625

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