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Proceedings Article

Block-copolymer healing of simple defects in a chemoepitaxial template

[+] Author Affiliations
Paul N. Patrone, Gregg M. Gallatin

National Institute of Standards and Technology (United States)

Proc. SPIE 8680, Alternative Lithographic Technologies V, 86801R (March 26, 2013); doi:10.1117/12.2011656
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From Conference Volume 8680

  • Alternative Lithographic Technologies V
  • William M. Tong; Douglas J. Resnick
  • San Jose, California, USA | February 24, 2013

abstract

Using the Leibler-Ohta-Kawasaki (LOK) phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. We apply boundary conditions that account for the interactions of the polymers with the templated substrate and a neutral top-coat. We derive formulas for the monomer density and the microdomain interface profile of periodic, lamellar BCP melts whose template lines are wider or narrower than the bulk microdomain width. For such systems, our analysis (i) shows that mass conservation causes the microdomain interfaces to oscillate about their bulk positions and (ii) determines the length scale λ over which these oscillations decay away from the substrate. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Paul N. Patrone and Gregg M. Gallatin
" Block-copolymer healing of simple defects in a chemoepitaxial template ", Proc. SPIE 8680, Alternative Lithographic Technologies V, 86801R (March 26, 2013); doi:10.1117/12.2011656; http://dx.doi.org/10.1117/12.2011656


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