Paper
29 March 2013 Rapid laser scanning based surface texturing for energy applications and laser-assisted doping
Matthew Quigley, Di Liu, Hee K. Park, Dong X. Yu, David J. Hwang
Author Affiliations +
Abstract
Extensive research in micro/nanoscale surface engineering has developed a variety of energy applications including improvement of light trapping performance in solar cells, and increased surfaced area on electrodes in batteries or fuel cells applications with extended life time. In this study, we are aiming to the evaluation of a cost effective surface texturing method based on rapid scanning of nanosecond laser pulses. In contrast to conventional laser-assisted methods, we have achieved highly uniform and controllable texturing means over arbitrary scanning area of semiconductor and metallic surfaces.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew Quigley, Di Liu, Hee K. Park, Dong X. Yu, and David J. Hwang "Rapid laser scanning based surface texturing for energy applications and laser-assisted doping", Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 860717 (29 March 2013); https://doi.org/10.1117/12.2005827
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Cited by 1 scholarly publication.
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KEYWORDS
Semiconductor lasers

Silicon

Doping

Solar energy

Solar cells

Laser processing

Laser scanners

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