Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

Jeremias Seppä; Ivan Kassamakov; Anton Nolvi; Ville Heikkinen; Tor Paulin; Antti Lassila; Ling Hao; Edward Hæggsröm

doi:10.1117/12.2020525

13 May 2013 Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

Jeremias Seppä, Ivan Kassamakov, Anton Nolvi, Ville Heikkinen, Tor Paulin, Antti Lassila, Ling Hao, Edward Hæggsröm

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 87883J (2013) https://doi.org/10.1117/12.2020525
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

A scanning white light interferometer can characterize out of plane features and motion in M(N)EMS devices. Like any other form and displacement measuring instrument, the scanning interferometer results should be linked to the metre definition to be comparable and unambiguous. Traceability is built up by careful error characterization and calibration of the interferometer. The main challenge in this calibration is to have a reference device producing accurate and reproducible dynamic out-of-plane displacement when submitted to standard loads. We use a flat mirror attached to a piezoelectric transducer for static and (quasi)dynamic calibration of a stroboscopic scanning light interferometer. First we calibrated the piezo-scanned flexure guided transducer stage using a symmetric differential heterodyne laser interferometer developed at the Centre for Metrology and Accreditation (MIKES). The standard uncertainty of the piezo stage motion calibration was 3.0 nm. Then we used the piezo-stage as a transfer standard to calibrate our stroboscopic interferometer whose light source was pulsed at 200 Hz and 400 Hz with 0.5% duty cycle. We measured the static position and (quasi)dynamic motion of the attached mirror relative to a reference surface. This methodology permits calibrating the vertical scale of the stroboscopic scanning white light interferometer.

Citation Download Citation

Jeremias Seppä, Ivan Kassamakov, Anton Nolvi, Ville Heikkinen, Tor Paulin, Antti Lassila, Ling Hao, and Edward Hæggsröm "Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87883J (13 May 2013); https://doi.org/10.1117/12.2020525

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available