Paper
17 May 2013 Efficient nanoparticle filtering using bioinspired functional sufaces
Sebastian Busch, Manuel Ketterer, Xenia Vinzenz, Christian Hoffmann, Jürgen Wöllenstein
Author Affiliations +
Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87630Z (2013) https://doi.org/10.1117/12.2017434
Event: SPIE Microtechnologies, 2013, Grenoble, France
Abstract
We present the development of a novel integrated device for airborne nanoparticle filtering with bioinspired nanoscale functionality. The underlying idea is to investigate the principle of adherent surfaces, e.g. pollen, as a biological model and transfer this functionality into a technology using functionalized microstructured surfaces offering an efficient filtering method for nanoscale airborne particles. We investigated the different pollen species for their structural and biochemical surface properties to achieve bioinspired surface functionality on silicon surfaces. Depending on surface morphology, the adhesive properties of the surfaces towards aerosol particles could be directly influenced.
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Sebastian Busch, Manuel Ketterer, Xenia Vinzenz, Christian Hoffmann, and Jürgen Wöllenstein "Efficient nanoparticle filtering using bioinspired functional sufaces", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630Z (17 May 2013); https://doi.org/10.1117/12.2017434
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KEYWORDS
Scanning electron microscopy

Silicon

Nanoparticles

Particles

Atmospheric particles

Adhesives

Semiconducting wafers

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