Monte Carlo study of the influence of electron beam focusing to SEM linewidth measurement

P. Zhang; S. F. Mao; Z. M. Zhang; Z. J. Ding

doi:10.1117/12.2015358

29 May 2013 Monte Carlo study of the influence of electron beam focusing to SEM linewidth measurement

P. Zhang, S. F. Mao, Z. M. Zhang, Z. J. Ding

Proceedings Volume 8729, Scanning Microscopies 2013: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences; 87290K (2013) https://doi.org/10.1117/12.2015358
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

Based on a Monte Carlo simulation method we have analyzed the influence of electron beam focusing to linewidth measurement for Si trapezoid lines by scanning electron microscopy (SEM) image. The electron probe focusing with finite probe width due to aberration is considered by two different models for simulating incident electron trajectories. The simulation result shows that on the specimen surface the electron beam profile is deviated from the Gaussian probe shape because of the surface topography; the measured linewidth then depends on the focus position and aperture angle.

Citation Download Citation

P. Zhang, S. F. Mao, Z. M. Zhang, and Z. J. Ding "Monte Carlo study of the influence of electron beam focusing to SEM linewidth measurement", Proc. SPIE 8729, Scanning Microscopies 2013: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 87290K (29 May 2013); https://doi.org/10.1117/12.2015358

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