A plasmonically enhanced pixel structure for uncooled microbolometer detectors

Ozan Erturk; Enes Battal; Seniz Esra Kucuk; Ali Kemal Okyay; Tayfun Akin

doi:10.1117/12.2019540

11 June 2013 A plasmonically enhanced pixel structure for uncooled microbolometer detectors

Ozan Erturk, Enes Battal, Seniz Esra Kucuk, Ali Kemal Okyay, Tayfun Akin

Proceedings Volume 8704, Infrared Technology and Applications XXXIX; 87041E (2013) https://doi.org/10.1117/12.2019540
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

This paper introduces a method of broadband absorption enhancement that can be integrated with the conventional suspended microbolometer process with no significant additional cost. The premise of this study is that electric field can be enhanced throughout the structural layer of the microbolometer, resulting in an increase in the absorption of the infrared radiation in the long wave infrared window. A concentric double C-shaped plasmonic geometry is simulated using the FDTD method, and this geometry is fabricated on suspended pixel arrays. Simulation results and FTIR measurements are in good agreement indicating a broadband absorption enhancement in the 8 µm-12 µm range for LWIR applications. The enhancement is attained using metallic geometries embedded in the structural layer of the suspended microbridge, where the metallic-dielectric interface increases the average absorption of a 35 µm pixel from 67.6% to 80.1%.

Citation Download Citation

Ozan Erturk, Enes Battal, Seniz Esra Kucuk, Ali Kemal Okyay, and Tayfun Akin "A plasmonically enhanced pixel structure for uncooled microbolometer detectors", Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 87041E (11 June 2013); https://doi.org/10.1117/12.2019540

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