Surface states characterization and simulation of Type-II In(Ga)Sb quantum dot structures for processing optimization of LWIR detectors

Qin Wang; Mina Rajabi; Amir Karim; Susanne Almqvist; Mietek Bakowski; Susan Savage; Jan Y. Andersson; Mats Göthelid; Shun Yu; Oscar Gustafsson; Mattias Hammar; Carl Asplund

doi:10.1117/12.2015966

18 June 2013 Surface states characterization and simulation of Type-II In(Ga)Sb quantum dot structures for processing optimization of LWIR detectors

Qin Wang, Mina Rajabi, Amir Karim, Susanne Almqvist, Mietek Bakowski, Susan Savage, Jan Y. Andersson, Mats Göthelid, Shun Yu, Oscar Gustafsson, Mattias Hammar, Carl Asplund

Author Affiliations +

Proceedings Volume 8704, Infrared Technology and Applications XXXIX; 870433 (2013) https://doi.org/10.1117/12.2015966
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

Quantum structures base on type-II In(Ga)Sb quantum dots (QDs) embedded in an InAs matrix were used as active material for achieving long-wavelength infrared (LWIR) photodetectors in this work. Both InAs and In(Ga)Sb are narrow band semiconductor materials and known to possess a large number of surface states, which apparently play significant impact for the detector’s electrical and optical performance. These surface states are caused not only by material or device processing induced defects but also by surface dangling bonds, oxides, roughness and contaminants. To experimentally analyze the surface states of the QD structures treated by different device fabrication steps, atomic force microscopy (AFM), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDX) and X-ray photoelectron spectroscopy (XPS) measurements were performed. The results were used to optimize the fabrication process of the LWIR photodetectors in our ongoing project. The dark current and its temperature dependence of the fabricated IR photodetectors were characterized in temperature range 10 K to 300 K, and the experiment results were analyzed by a theoretic modeling obtained using simulation tool MEDICI.

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Qin Wang, Mina Rajabi, Amir Karim, Susanne Almqvist, Mietek Bakowski, Susan Savage, Jan Y. Andersson, Mats Göthelid, Shun Yu, Oscar Gustafsson, Mattias Hammar, and Carl Asplund "Surface states characterization and simulation of Type-II In(Ga)Sb quantum dot structures for processing optimization of LWIR detectors", Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 870433 (18 June 2013); https://doi.org/10.1117/12.2015966

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KEYWORDS

Indium arsenide

Sensors

Etching

Long wavelength infrared

Photodetectors

Scanning electron microscopy

Quantum dots

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