Coaxial phase-shifting laser diode interferometer based on pulse modulation

Takamasa Suzuki; Takuma Serizawa; Osami Sasaki; Samuel Choi

doi:10.1117/12.2023531

6 September 2013 Coaxial phase-shifting laser diode interferometer based on pulse modulation

Takamasa Suzuki, Takuma Serizawa, Osami Sasaki, Samuel Choi

Proceedings Volume 8839, Dimensional Optical Metrology and Inspection for Practical Applications II; 88390A (2013) https://doi.org/10.1117/12.2023531
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

A pulse-modulated phase-shifting interferometer that employs two coaxial interferometers and an undersampling technique is proposed and demonstrated. The former improves the robustness of the optical system, while the latter makes it economical. Several measurements on flat and concave mirrors confirmed a measurement accuracy of ~18 nm.

Citation Download Citation

Takamasa Suzuki, Takuma Serizawa, Osami Sasaki, and Samuel Choi "Coaxial phase-shifting laser diode interferometer based on pulse modulation", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 88390A (6 September 2013); https://doi.org/10.1117/12.2023531

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