Development of achromatic full-field x-ray microscopy with compact imaging mirror system

S. Matsuyama; Y. Emi; H. Kino; Y. Sano; Y. Kohmura; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.2023152

26 September 2013 Development of achromatic full-field x-ray microscopy with compact imaging mirror system

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8851, X-Ray Nanoimaging: Instruments and Methods; 885107 (2013) https://doi.org/10.1117/12.2023152
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Compact advanced Kirkpatrick–Baez optics are used to construct a microscope that is easy to align and robust against vibrations and thermal drifts. The entire length of the imaging mirror system is 286 mm, which is 34% shorter than the previous model. A spatial resolution test is performed in which magnified bright-field images of a pattern are taken with an X-ray camera at an energy of 10 keV at the BL29XUL beamline of SPring-8. A line-and-space pattern having a 50- nm width could be resolved, although the image contrast is low.

Citation Download Citation

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of achromatic full-field x-ray microscopy with compact imaging mirror system", Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 885107 (26 September 2013); https://doi.org/10.1117/12.2023152

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