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Proceedings Article

Non-touch thermal air-bearing shaping of x-ray telescope optics

[+] Author Affiliations
Edward Sung, Brandon Chalifoux

Massachusetts Institute of Technology (United States)

Mark L. Schattenburg, Ralf K. Heilmann

MIT Kavli Institute for Astrophysics and Space Research (United States)

Proc. SPIE 8861, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI, 88610R (September 26, 2013); doi:10.1117/12.2026100
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From Conference Volume 8861

  • Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI
  • Stephen L. O'Dell; Giovanni Pareschi
  • San Diego, California, United States | August 25, 2013

abstract

Molding glass by using air bearings is a promising procedure for inexpensive and high precision glass shaping. Thin glass sheets are sandwiched between air bearings and pushed flat while being thermally cycled. In this study, a novel device for shaping glass is created and tested using 0.5 mm thick, 100 mm round, Schott D263 wafers. Numerous samples were shaped with varying values for bearing-to-glass gap and maximum temperature, and were measured with a Shack Hartmann metrology tool. Glass was shaped with bearing-to-glass gaps of >50 μm, 36±2.5 μm, and 30.5±2.5 μm. The best peak-to-valley (P-V) flatness achieved is 6.7/3.6±0.5 μm for front/back of the glass sheet, using a gap of 36±2.5 μm. The average steady-state P-V achieved is 12 μm. Using the same device parameters, the best repeatability achieved over the whole 100 mm wafer is 2.7±0.5 μm P-V and 9.5 arcseconds RMS slope error. When looking at 60 mm sections, the repeatability improves to <1 μm P-V and 5±0.5 arcsec. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Edward Sung ; Brandon Chalifoux ; Mark L. Schattenburg and Ralf K. Heilmann
" Non-touch thermal air-bearing shaping of x-ray telescope optics ", Proc. SPIE 8861, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI, 88610R (September 26, 2013); doi:10.1117/12.2026100; http://dx.doi.org/10.1117/12.2026100


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