Evaluation and optimization of the Savitzky-Golay smoothing filter for noise reduction in thin film interference signal analysis

Petros I. Stavroulakis; Panos Liatsis; Nicholas Tipping; Paul Craddock

doi:10.1117/12.2024031

30 September 2013 Evaluation and optimization of the Savitzky-Golay smoothing filter for noise reduction in thin film interference signal analysis

Petros I. Stavroulakis, Panos Liatsis, Nicholas Tipping, Paul Craddock

Author Affiliations +

Proceedings Volume 8842, Novel Optical Systems Design and Optimization XVI; 88420H (2013) https://doi.org/10.1117/12.2024031
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

In this work, we present a comparison between Savitzky-Golay filtering and the traditional treatment of subtracting a dark signal to reduce noise from thin film interference spectra, acquired by a spectrometer in an adaptive system, where integration time needs to be varied for each measurement. We show that both classical Savitzky-Golay and dark signal removal are not optimal for interference spectra, however by applying a gradual variation of the Savitzky-Golay bin parameters across the signal, an adaptive version of the Savitsky-Golay technique can be used as a general-purpose noise reduction method for signals collected by an adaptive thin film thickness measurement system.

Citation Download Citation

Petros I. Stavroulakis, Panos Liatsis, Nicholas Tipping, and Paul Craddock "Evaluation and optimization of the Savitzky-Golay smoothing filter for noise reduction in thin film interference signal analysis", Proc. SPIE 8842, Novel Optical Systems Design and Optimization XVI, 88420H (30 September 2013); https://doi.org/10.1117/12.2024031

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