Structure design and characteristic analysis of micro-nano probe based on six dimensional micro-force measuring principle

Hong-tao Yang; Chun-mei Cai; Chuan-zhi Fang; Tian-feng Wu

doi:10.1117/12.2035715

10 October 2013 Structure design and characteristic analysis of micro-nano probe based on six dimensional micro-force measuring principle

Hong-tao Yang, Chun-mei Cai, Chuan-zhi Fang, Tian-feng Wu

Author Affiliations +

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89161Q (2013) https://doi.org/10.1117/12.2035715
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

In order to develop micro-nano probe having error self-correcting function and good rigidity structure, a new micro-nano probe system was developed based on six-dimensional micro-force measuring principle. The structure and working principle of the probe was introduced in detail. The static nonlinear decoupling method was established with BP neural network to do the static decoupling for the dimension coupling existing in each direction force measurements. The optimal parameters of BP neural network were selected and the decoupling simulation experiments were done. The maximum probe coupling rate after decoupling is 0.039% in X direction, 0.025% in Y direction and 0.027% in Z direction. The static measurement sensitivity of the probe can reach 10.76με / mN in Z direction and 14.55με / mN in X and Y direction. The modal analysis and harmonic response analysis under three dimensional harmonic load of the probe were done by using finite element method. The natural frequencies under different vibration modes were obtained and the working frequency of the probe was determined，which is higher than 10000 Hz . The transient response analysis of the probe was done, which indicates that the response time of the probe can reach 0.4 ms. From the above results, it is shown that the developed micro-nano probe meets triggering requirements of micro-nano probe. Three dimension measuring force can be measured precisely by the developed probe, which can be used to predict and correct the force deformation error and the touch error of the measuring ball and the measuring rod.

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Hong-tao Yang, Chun-mei Cai, Chuan-zhi Fang, and Tian-feng Wu "Structure design and characteristic analysis of micro-nano probe based on six dimensional micro-force measuring principle", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89161Q (10 October 2013); https://doi.org/10.1117/12.2035715

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KEYWORDS

Neural networks

Bridges

Laser development

Modal analysis

Neurons

3D metrology

Error analysis

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