Design, simulation, and fabrication of nano-scale silicon-on-insulator (SOI) integrated photonic phased array switch elements (IPPAS) utilizing nanoelectromechanical systems (NEMS)

Ali A. Hussein; Sawsan Abdul Majid; Trevor J. Hall

doi:10.1117/12.2041748

11 October 2013 Design, simulation, and fabrication of nano-scale silicon-on-insulator (SOI) integrated photonic phased array switch elements (IPPAS) utilizing nanoelectromechanical systems (NEMS)

Ali A. Hussein, Sawsan Abdul Majid, Trevor J. Hall

Author Affiliations +

Proceedings Volume 8915, Photonics North 2013; 89150W (2013) https://doi.org/10.1117/12.2041748
Event: Photonics North 2013, 2013, Ottawa, Canada

Abstract

The goal of this research is to introduce the design and simulation of a novel 2×2 SOI integrated photonic phased array switch. Under-etched NEMS-operated slot waveguides are used as the active phase shifters offering the benefits of compact size and low power consumption. The design of the NEMS-operated phase shifter has been validated by numerical analysis and simulation. The finite difference mode three-dimensional full-vectorial solver of FIMMPROP is used for the simulation. The designed NEMS-operated phase shift element is only 349 μm in length, exhibits an excess loss of about 1.1 dB and provides a phase shift of 180°. Straight transition slot waveguide couplers with high efficiency of about 96.7% have been designed to couple the NEMS-operated phase shifters to standard unslotted waveguides. The 2×2 MMI (multimode interference) couplers used in the switch element feature a compact size of 4μm × 61.2 μm, have a small excess loss of about 0.155 dB and minimal imbalance of about -0.004 dB. The NEMS-operated phase shifters are located on the sides of the switch with their outermost electrode bond pads. Optical interferogram response is utilized for the testing of the designed phase shifters.

Citation Download Citation

Ali A. Hussein, Sawsan Abdul Majid, and Trevor J. Hall "Design, simulation, and fabrication of nano-scale silicon-on-insulator (SOI) integrated photonic phased array switch elements (IPPAS) utilizing nanoelectromechanical systems (NEMS)", Proc. SPIE 8915, Photonics North 2013, 89150W (11 October 2013); https://doi.org/10.1117/12.2041748

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