CW emission at 193 nm using an all solid-state laser source

Matthias Scholz; Dmitrijs Opalevs; Jürgen Stuhler; Patrick Leisching; Wilhelm Kaenders; Guiling Wang; Xiaoyang Wang; Rukang Li; Chuangtian Chen

doi:10.1117/12.2037191

20 February 2014 CW emission at 193 nm using an all solid-state laser source

Matthias Scholz, Dmitrijs Opalevs, Jürgen Stuhler, Patrick Leisching, Wilhelm Kaenders, Guiling Wang, Xiaoyang Wang, Rukang Li, Chuangtian Chen

Author Affiliations +

Proceedings Volume 8964, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XIII; 896402 (2014) https://doi.org/10.1117/12.2037191
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

We report on the realization of a narrow-band continuous-wave laser source in the deep-ultraviolet. Via two consecutive second-harmonic processes starting from a near-infrared diode laser system, we demonstrate an output power of more than 15 mW at 193 nm. The setup is capable of mode hop-free frequency tuning over a range of 100 GHz und coarse tuning over more than 5 nm. We see direct applications of this laser source in the fields of semiconductor metrology and high-resolution spectroscopy in the deep-ultraviolet.

Citation Download Citation

Matthias Scholz, Dmitrijs Opalevs, Jürgen Stuhler, Patrick Leisching, Wilhelm Kaenders, Guiling Wang, Xiaoyang Wang, Rukang Li, and Chuangtian Chen "CW emission at 193 nm using an all solid-state laser source", Proc. SPIE 8964, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XIII, 896402 (20 February 2014); https://doi.org/10.1117/12.2037191

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