Volume displacement measurement via multi-wavelength digital holographic surface topography at the microscopic level

L. Williams; P. P. Banerjee; G. Nehmetallah; S. Praharaj

doi:10.1117/12.2040494

25 February 2014 Volume displacement measurement via multi-wavelength digital holographic surface topography at the microscopic level

L. Williams, P. P. Banerjee, G. Nehmetallah, S. Praharaj

Author Affiliations +

Proceedings Volume 9006, Practical Holography XXVIII: Materials and Applications; 90060K (2014) https://doi.org/10.1117/12.2040494
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

In this work multiwavelength digital holography, originally applied to calculate the volume displacement of various macroscopic topographic surface features, is now extended to the case of microscopic objects. Accurate measurements of volume displacement for macroscopic surface features has been achieved using long synthetic wavelengths up to several millimeters, generated via tunable IR laser sources. Microscopic volume measurements are performed via digital holographic microscopy using HeNe and Ar⁺ ion lasers to generate very short synthetic wavelengths. Practical methods of implementation are considered, including wavelength selection error and the geometric effects of both Michelson and Mach-Zehnder recording configurations on phase measurement. Results include comparisons to standard metrology tools, including 1D profilometry and white light interferometry.

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L. Williams, P. P. Banerjee, G. Nehmetallah, and S. Praharaj "Volume displacement measurement via multi-wavelength digital holographic surface topography at the microscopic level", Proc. SPIE 9006, Practical Holography XXVIII: Materials and Applications, 90060K (25 February 2014); https://doi.org/10.1117/12.2040494

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